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https://www.nist.gov/people/hae-jeong-lee
Hae-Jeong Lee (Fed)
Research Interests
Developing new metrology to characterize nano-structures in thin film and membrane using X-ray reflectivity (SXR), small angle x-ray scattering (SAXS), grazing incident small angle x-ray scattering (GI-SAXS) and small angle neutron scattering (SANS)
Study on the effects of confinement geometry on crosslinking density of UV nanoimprint resist
Developing advanced characterization methods for determining regular and irregular nano- and micro- scale patterns using SXR as a pattern shape metrology
Developing novel resist for high resolution e-beam lithography and fabricating reliable nano-patterns using newly developed resist
Structural characterization of porous thin films including porosity, average pore size, pore connectivity, pore size distribution, matrix density, average film density, and water uptake using SXR, SAXS, GI-SAXS, and SANS
Characterizing surface and interfacial structures and density depth profiles of thin films
Awards and Honors
MSEL Distinguished Associate Award (2007) Best Poster Award at MRS Spring Meeting (2001) Gold Medal Award at Samsung Semiconductor R & D Center Conference (1995)
Q Lin, Stephen Cohen, Lynne Gignac, Brian Herbst, David Klaus, Eva Simonyi, Jeffrey Hedrick, John Warlaumont, Hae-Jeong Lee, Wen-Li Wu
Low dielectric constant (low-k) nanocomposite thin films have been prepared by spin coating and thermal cure of solution mixtures of two organic low-k thermoset
Yiping Liu, Wen-Li Wu, B J. Foran, D Gidley, Hae-Jeong Lee, Barry J. Bauer, B D. Vogt
A methylsilsesquioxane based porous spin-on dielectric has been evaluated at International SEMETCH (ISMT) for advanced interconnect applications. The pore
Haruki Kobayashi, Walter G. McDonough, Joy Dunkers, Jae H. Kim, Hae-Jeong Lee, Scott Wight, Amanda L. Forster, Kirk D. Rice, Gale A. Holmes
Poly (p-phenylene benzobisoxazole) (PBO) fibers have been used in soft body armor (SBA) because of their high mechanical strength. However, there was an