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2021 Bronze Medal Award

AWARD CITATION

The group is recognized for rapid, cost-effective installation and qualification of reactive-ion etching and plasma enhanced chemical-vapor deposition systems in the NIST Center for Nanoscale Science and Technology nanofabrication facility. The team’s efforts solved a long-standing problem of cross-contamination and thus increased the repeatability and uniformity of silicon-nitride nanodevices for key research projects.

GROUP AWARD

Satrick Richardson

Physical Scientist
Physical Measurement Laboratory

Stoyan Jeliazkov

Physical Scientist
Physical Measurement Laboratory

Peter Litwinowicz

Chemical Engineer
Physical Measurement Laboratory

Joseph Di Pasquale III

Engineering Technician
Physical Measurement Laboratory