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Tools and Instruments

Displaying 1 - 12 of 12

Beamline 7: EUV reflectometry

The NIST/DARPA EUV Reflectometry facility began in the late 1980's to make measurements of the reflectivity of EUV multilayer optics for lithography. Since then

Si EUV Photodiode Transfer Standard

Silicon (Si) photodiodes are issued by NIST as transfer standard detectors throughout the extreme ultraviolet spectral region (5 nm to 254 nm). Each device is