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Hiden Analytical DSMS Mass Spectometer
A Residual Gas Analyzer configured for demanding UHV applications
The Hiden RGA for UHV are designed and configured for residual gas analysis in demanding UHV applications where critical measurements at UHV are required.
Residual gas analysis
Leak detection
Desorption
Outgassing studies
Bakeout cycles
Pump performance
Process gas contaminants
Please see manual.
Specifications/Capabilities
Gold plated ion sources to minimise source outgassing
Electron impact ioniser with twin oxide coated Iridium filament
Dual Faraday/channeltron electron multipler detector
Minimum detectable partial pressure of 5 x 10-14 mbar
Maximum operating pressure of 1 x 10-4 mbar