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Engineering Laboratory

Intelligent Systems Division

Precision Meso/Micro Systems for Nanomanufacturing

Micro- and Nano-Manipulation for Manufacturing Applications and Manipulating Micro-Scale Spheres

Project Goal

Develop world-class advanced control and positioning systems for nano-scale measurements, assembly and standards. This includes arrays of high-precision micro-scale nanopositioning stages for scanning probe microscopy and nanomanipulation using MEMS technology; automated assembly of micro- and nano-scale components; and multi-degree-of-freedom nanometer-resolution fiber optic displacement sensors.

Publications

Y.S. Kim, N. G. Dagalakis, C. Ferraris, S. A. Zamurovic, "Design of a 1 DOF MEMS motion stage for a parallel plane geometry rheometer," Electronics Journal, Volume 19, No. 2, December 2015, pp. 45-51. Abstract only posted.

Y.S. Kim, S.H. Yang, K.W. Yang, N. G. Dagalakis, "Design of MEMS vision tracking system based on a micro fiducial marker," Sensors and Actuators A: Physical 234, 48–56, October (2015). - Abstract only posted.

H. Shi, H.-J. Su, N. Dagalakis, "A Stiffness Model for Control and Analysis of a MEMS Hexapod Nanopositioner," Journal of Mechanism and Machine Theory, Volume 80, October 2014, Pages 246–264.

Y.S. Kim, N.G. Dagalakis, S.K. Gupta, K. Satyandra, "Design of MEMS based 3-axis motion stage by incorporating a nested structure," Journal of Micromechanics and Microengineering, Volume 24, June 5, 2014 (11pp).

Y.S. Kim, N.G. Dagalakis, S.K. Gupta, "Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features," Journal of Micromechanics and Microengineering, Vol. 23, No. 5, May 2013, 055008 (10pp).

H. Shi, H.J. Su, N. Dagalakis, J.A. Kramar, "Kinematic Modeling and Calibration of a Flexure Based Hexapod Nanopositioner," Journal of Precision Engineering, Vol. 37, Issue 1, January 2013, pp. 117-128.

Y.M. Choi, J.J. Gorman, N.G. Dagalakis, S.H. Yang, Y.S. Kim, J.M. Yoo, "A High-Bandwidth Electromagnetic MEMS Motion Stage for Scanning Applications," Journal of Micromechanics and Microengineering, Vol. 22 Featured Article, No. 10, October (2012) 105012 (9pp).

J.D. Wason, J.T. Wen, J.J. Gorman, N.G. Dagalakis, "Automated Multi-Probe Microassembly using Vision Feedback," IEEE TRANSACTIONS ON ROBOTICS, VOL. 28, NO. 5, Octover 2012.

Y.S. Kim, J.M. Yoo, S.H. Yang, Y.M. Choi, N.G. Dagalakis, S.K. Gupta, "Design, fabrication and testing of a serial kinematic MEMS XY stage for multi-finger manipulation," Journal of Micromechanics and Microengineering, Vol. 22, No. 8, August 2012, 085029 (10pp).

S.H. Yang, Y.S. Kim, J.M. Yoo, N.G. Dagalakis, "MEMS-based Stewart Platform with sub-nano resolution," Applied Physics Letters, Vol. 101, Issue 6, August 6, 2012, 061909 (5pp).

Kim, Y-S., Dagalakis, N., Gupta, S.K., "Design and Fabrication of a Three-DOF MEMS Stage Based on Nested Structures," Proceedings of the ASME 2012 International Design Engineering Technical Conference & Computers and Information in Engineering Conference IDETC/CIE 2012, Chicago, IL, USA, August 12-15, 2012.

Avramov-Zamurovic, S., Yoo, J.M., Dagalakis, N.G., Lee, R.D., "Displacement Sensor for Detecting Sub-micrometer Motion," Proceedings of the Conference on Precision Electromagnetic Measurements (CPEM 2012), Washington, DC, USA, 1-6 July 2012.

Kim, Y-S., Dagalakis, N., Gupta, S.K. "Design, fabrication, and characterization of a single-layer out-of-plane electrothermal actuator for SOI-MEMS," Proceedings of 2012 Performance Metrics for Intelligent Systems Workshop, College Park, MD, USA, March 20-22, 2012.

CNST news release, "ACTA Technology Develops a Handheld Blood Meter in the NanoFab."

Kim, Y-S., Dagalakis, N.G., Gupta, S.K., "A Two Degree of Freedom Nanopositioner with Electrothermal Actuators for Decoupled Motion," Proceedings of IDETC/DTM 2011, ASME 2011 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference, August 29-31, 2011, Washington, DC.

Avramov-Zamurovic, S., Dagalakis, N.G., Lee, R.D., Yoo, J.M., Kim, Y.S., Yang, S.H., "Embedded Capacitive Displacement Sensor for Nanopositioning Applications," Published in the IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, VOL. 60, NO. 7, July 2011.

J.D.Wason, J.T.Wen, N.G. Dagalakis, "Dextrous Manipulation of a Micropart with Multiple Compliant Probes through Visual Force Feedback," Proceedings of the 2011 IEEE International Conference on Robotics and Automation (ICRA 2011), Shanghai, China, May 9-13, 2011.

Micro Rheometer is Latest Lab On a Chip Device

G.F. Christopher, J.M. Yoo, N. Dagalakis, S.D. Hudson, K.B. Migler, "Development of a MEMS based Dynamic Rheometer," The Royal Society of Chemistry Lab on a Chip Journal, (2010) 10 2749-2757.

S.H. Yang, Y.S. Kim, K.P. Purushotham, J.M. Yoo, Y.M. Choi, N. Dagalakis, "AFM characterization of nanopositioner in-plane stiffnesses," Journal of Sensors and Actuators A: Physical, 163 (2010) 383-387.

J.D.Wason, J.T.Wen, Y.M. Choi, J.J. Gorman, N.G. Dagalakis, "Vision Guided Multi-Probe Assembly of 3D Microstructures," Proceedings of the 2010 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2010), Taipei, Taiwan, October 18-22, 2010.

S.A. Zamurovic, N.G. Dagalakis, R.D. Lee, Y.S. Kim, J.M. Yoo, S.H. Yang, "Embedded Capacitive Displacement Sensor for Nanopositioning Applications," Proceedings of the Conference on Precision Electromagnetic Measurements 2010, Daejeon, Korea, June 13-18, 2010.

G.F. Christopher, N. G. Dagalakis, S.D. Hudson, K.B. Migler, "MEMS Parallel-Plate Rheometer for Small Amplitude Oscillatory Shear Micro Rheology Measurements," Society of Rheology, 81st Annual Meeting, Madison, WI, October 18-22, 2009.

Wason, J.; Gressick, W.; Wen, J.; Gorman, J. J.; Dagalakis, N. G., "Multi-Probe Assembly," Proceedings of the 3rd Annual IEEE Conference on Automation Science and Engineering (CASE 2007), Scottsdale, AZ, September 22-25, 2007.

Gorman, J.J., Kim, Y.-S., Vladar, A.E., and Dagalakis, N.G., "Design of an on-chip micro-scale nanoassembly system," International Journal of Nanomanufacturing, vol. 1, pp. 710-721, 2007.

Gorman, J., Kim, Y-S., Vladar, A.E., and Dagalakis, N.G., "Design of an On-Chip Micro-Scale Nanoassembly System," Proceedings of the International Symposium on Nanomanufacturing, 2006. Gorman, J., Kim, Y-S., and Dagalakis, N.G., "Control of MEMS Nanopositioners with Nano-Scale Resolution," Proceedings of the ASME International Mechanical Engineering Conference and Exhibition, 2006.

Gorman, J.J. and Dagalakis, N.G., "Probe-based micro-scale manipulation and assembly using force feedback," International Conference on Robotics and Remote Systems for Hazardous Environments, Salt Lake City, UT, 2006, pp. 621-628.

S. Bérgna, J. J. Gorman, and N. G. Dagalakis, "Design and modeling of thermally actuated MEMS nanopositioners," ASME International Mechanical Engineering Congress and Exposition, Orlando, FL, 2005, IMECE2005-82158.

B. H. Kang, J. T.-Y. Wen, N. G. Dagalakis, and J. J. Gorman, "Analysis and design of parallel mechanisms with flexure joints," IEEE Transactions on Robotics, vol. 21, pp. 1179-1185, 2005.

B. H. Kang, J. T.-Y. Wen, N. G. Dagalakis, and J. J. Gorman, "Design optimization for a parallel MEMS mechanism with flexure joints," ASME Design Engineering Technical Conferences, Salt Lake City, UT, 2004, DETC2004/MECH-57455.

B. H. Kang, J. T.-Y. Wen, N. G. Dagalakis, and J. J. Gorman, "Analysis and design of parallel mechanisms with flexure joints," IEEE International Conference on Robotics and Automation, New Orleans, LA, 2004, pp. 4097-4102.

J. J. Gorman and N. G. Dagalakis, "Force control of linear motor stages for microassembly," ASME International Mechanical Engineering Congress and Exposition, Washington, DC, 2003, IMECE2003-42079.

J. J. Gorman and N. G. Dagalakis, "Modeling and disturbance rejection control of a nanopositioner with application to beam steering," ASME International Mechanical Engineering Congress and Exposition, Washington, DC, 2003, IMECE2003-41603.

J. J. Gorman, N. G. Dagalakis, and B. G. Boone, "Multi-loop control of a nanopositioning mechanism for ultra-precision beam steering," Free Space Laser Communication and Active Illumination III, SPIE Vol. 5160, pp. 170-181, 2003.

K. B. Fielhauer, B. G. Boone, J. R. Bruzzi, B. E. Kluga, J. R. Connelly, M. M. Bierbaum, J. J. Gorman, and N. Dagalakis, "Comparison of macro-tip/tilt and meso-scale position beam steering transducers for free-space optical communications using a quadrant photodiode sensor," Free Space Laser Communication and Active Illumination III, SPIE Vol. 5160, pp. 192-203, 2003.

N. G. Dagalakis, T. LeBrun, and J. Lippiatt, "Micro-mirror array control of optical tweezer trapping beams," Proceedings of the IEEE Conference on Nanotechnology, Washington, DC, 2002, pp. 177-180.

B. G. Boone, R. S. Bokulic, G. B. Andrews, R. L. McNutt Jr., and N. Dagalakis, "Optical and microwave communications system conceptual design for a realistic interstellar explorer," Free-Space Laser Communication and Laser Imaging II, SPIE Vol. 4821, pp. 225-236, 2002.

N. G. Dagalakis, J. A. Kramar, E. Amatucci, and R. Bunch, "Kinematic modeling and analysis of a planar micro-positioner," Proceedings of the ASPE Annual Meeting, Crystal City, VA, 2001, pp. 135-138.

N. G. Dagalakis and E. Amatucci, "Kinematic modeling of a 6 degree of freedom tri-stage micro-positioner," Proceedings of the ASPE Annual Meeting, Crystal City, VA, 2001, pp. 200-203.

Presentations

MEMS Nanopositioning Mechanisms: Design and Experimental Characterization, MEMS Alliance Symposium April 19, 2005

The NIST Dual Parallel Cantilever MEMS Scale Micro Positioner, November 29, 2004

Performance Evaluation of a Parallel Cantilever Biaxial Micropositioning Stage
Given on October 26, 2000 at the American Society for Precision Engineering 2000 Annual Meeting in Scottsdale, AZ by Ed Amatucci

High-Performance Micropositioners for Opto-Electronic Manufacturing Given on April 18, 2000 at SPIE/New England Chapter, CORNING Lasertron, in Bedford, MA by Nicholas G. Dagalakis and Edward Amatucci

An Overview of Nano/Micro/Meso Scale Manufacturing at NIST
Given on March 13-15, 2000 at the Nano Tribology Workshop at NIST in Gaithersburg, MD by Ed Amatucci

Meso/Micro/Nano Scale Technologies at NIST
Given on October 19, 1999 by John Evans to DARPA

Visiting Committee Presentation
Given on June 8, 1999 by John Evans and Clayton Teague

Videos

6 DOF MEMS Hexapod nanopositioner robotic manipulator

Array of XYZ 3DOF MEMS nanopositioner robotic manipulators

NIST Nano Liter Rheometer

Watch the "Z-Axis Actuator Motion" Video

Watch the "Open Loop Control of a 1 DOF MEMS Nanopositioner" Video

Watch the "2DOF MEMS Nanopositioner" Video.

NIST/MEL_Dual Parallel Cantilever MEMS Scale Micro Positioner (avi file)

Reports

Paper written by Donna Le, University of Maryland SURF Student, Summer 2008, "Performance of a Nanopositioner Controller Filter Compensator.:

Calibration of a Force Feedback Joystick

Final Report on Micro-Meso Scale Manufacturing Exploratory Project

Proceedings of Manufacturing Technology for Integrated Nano- to Millimeter (In2m) Sized Systems: The State of the Art, and Opportunities for Further Advances Workshop
Held on March 11 - 12, 1999
George Mason University
Arlington, VA

Manufacturing Three-Dimensional Components and Devices at the Meso and Micro Scales Workshop

Co-sponsored by the National Institute of Standards and Technology and the National Science Foundation
Held on May 18 - 19, 1999
National Instiute of Standards and Technology
Gaithersburg, MD

Calibration of an Optical Sensor
Paper written by Jimmy H. Daruwalla, Sidwell Friends School under the Supervision of Dr. Nicholas G. Dagalakis