NANOSCALE RELIABILITY GROUP (647.05): Develops new measurement methods for predicting materials reliability when material and device dimensions are constrained at the micro- and nanoscale. Provides instrumentation, test structures, and models for evaluating the critical parameters leading to material failure, including defects, interfaces, and local variations in material properties, as well new techniques for directly evaluating reliability of thin films and nanostructures.
AFM-Based Nanomechanics—Local mechanical-property information is essential to evaluate emerging micro- and nanoscale materials, which many manufacturers would like to leverage for their unique properties. Existing …
Thin Film and Interconnect Reliability—This project, now concluded, developed methods to evaluate the reliability of thin films and interconnects in their as-manufactured states. Such tests are particularly important for nanoscale …
Analytical Transmission Scanning Electron Microscopy—This project develops low-energy transmission electron diffraction, imaging, and spectroscopy in the scanning electron microscope, to enable determinations of microscopic structure, defect types, …
R. R. Keller and R. H. Geiss, "Transmission EBSD from 10 nm domains in a scanning electron microscope," Journal of Microscopy, vol. 245, pp. 245-251 (2012).
Nanoscale Reliability Group
Vinod Tewary, Acting Group Leader
325 Broadway, MS 853
Boulder, CO 80305-3328