Publication Citation
NIST Authors in Bold
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| Author(s): | Kenneth G. Kreider; F DiMeo; |
|---|---|
| Title: | Platinum/Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers |
| Published: | February 12, 1998 |
| Abstract: | |
| Citation: | Sensors and Actuators A-Physical |
| Volume: | 69 |
| Pages: | pp. 46 - 52 |
| Research Areas: | Chemistry |