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Publication Citation: Platinum/Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers

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Author(s): Kenneth G. Kreider; F DiMeo;
Title: Platinum/Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers
Published: February 12, 1998
Abstract:
Citation: Sensors and Actuators A-Physical
Volume: 69
Pages: pp. 46 - 52
Research Areas: Chemistry