@article{107586,
  author = {Kenneth Kreider and F DiMeo},
  title = {Platinum/Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers},
  year = {1998},
  number = {69},
  month = {1998-02-12},
  publisher = {Sensors and Actuators A-Physical},
  language = {en},
}