TY  - JOUR
AU  - Kenneth Kreider
AU  - F DiMeo
C2  - Sensors and Actuators A-Physical
DA  - 1998-02-12
LA  - en
M1  - 69
PB  - Sensors and Actuators A-Physical
PY  - 1998
TI  - Platinum/Palladium Thin-Film Thermocouples for Temperature Measurements on Silicon Wafers
ER  -