Publication Citation
NIST Authors in Bold
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| Author(s): | Mark A. Sobolewski; J G. Langan; B S. Felker; |
|---|---|
| Title: | Electrical Optimization of PECVD Chamber Cleaning Plasmas |
| Published: | February 11, 1998 |
| Abstract: | |
| Citation: | Journal of Vacuum Science and Technology B |
| Volume: | 16 No. 1 |
| Pages: | pp. 173 - 182 |
| Research Areas: | Chemistry |