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Publication Citation: Electrical Optimization of PECVD Chamber Cleaning Plasmas

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Author(s): Mark A. Sobolewski; J G. Langan; B S. Felker;
Title: Electrical Optimization of PECVD Chamber Cleaning Plasmas
Published: February 11, 1998
Abstract:
Citation: Journal of Vacuum Science and Technology B
Volume: 16 No. 1
Pages: pp. 173 - 182
Research Areas: Chemistry