@article{108751,
  author = {Mark Sobolewski and J Langan and B Felker},
  title = {Electrical Optimization of PECVD Chamber Cleaning Plasmas},
  year = {1998},
  number = {16 No. 1},
  month = {1998-02-11},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}