TY  - JOUR
AU  - Mark Sobolewski
AU  - J Langan
AU  - B Felker
C2  - Journal of Vacuum Science and Technology B
DA  - 1998-02-11
LA  - en
M1  - 16 No. 1
PB  - Journal of Vacuum Science and Technology B
PY  - 1998
TI  - Electrical Optimization of PECVD Chamber Cleaning Plasmas
ER  -