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Linewidth Intercomparison on a Polysilicon Sample

Published

Author(s)

John S. Villarrubia, Andras Vladar, Michael T. Postek, Ronald G. Dixson

Abstract

Not available.
Citation
ISEMATECH Technology Transfer Document; NIST/ SEMATECH Proprietary

Keywords

AFM, atomic force microscopy, critical dimension metrology, library-based metrology, linewidth metrology, scanning electron microscopy, SEM

Citation

Villarrubia, J. , Vladar, A. , Postek, M. and Dixson, R. (2000), Linewidth Intercomparison on a Polysilicon Sample, ISEMATECH Technology Transfer Document; NIST/ SEMATECH Proprietary (Accessed March 28, 2024)
Created November 1, 2000, Updated February 19, 2017