TY  - VIDEO
AU  - John Villarrubia
AU  - Andras Vladar
AU  - Michael Postek
AU  - Ronald Dixson
C2  - ISEMATECH Technology Transfer Document; NIST/ SEMATECH Proprietary
DA  - 2000-11-01
LA  - en
PB  - ISEMATECH Technology Transfer Document; NIST/ SEMATECH Proprietary
PY  - 2000
TI  - Linewidth Intercomparison on a Polysilicon Sample
ER  -