@misc{188751,
  author = {John Villarrubia and Andras Vladar and Michael Postek and Ronald Dixson},
  title = {Linewidth Intercomparison on a Polysilicon Sample},
  year = {2000},
  month = {2000-11-01},
  publisher = {ISEMATECH Technology Transfer Document; NIST/ SEMATECH Proprietary},
  language = {en},
}