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|Author(s):||John A. Dagata; A Diebold; C Shih; R Colton;|
|Title:||A New Workshop Summary Report: Industrial Applications of Scanned Probe Microscopy|
|Published:||January 01, 1994|
|Abstract:||An Industrial Applications of Scanned Probe Microscopy (SPM) workshop was held at NIST Gaithersburg on March 24-25 1994. The meeting, co-sponsored by NIST, SEMATECH, ASTM E42.14, and the American Vacuum Society, was attended by over one hundred SPM users, suppliers, researchers and program managers from industry, government, and academia. The workshop aimed to develop a consensus view on standard practices for SPM-based measurements, and to establish the basic features required of future generations of commercially available SPMs required for quantitative measurement. Workshop discussions identified three critical standardization, requirements: the timely publication of standard methods and practices for obtaining and reporting experimental data, the development and widespread availability of suitable standardized roughness and step-height calibration samples, and probe tip characterization. The discussions also identified several critical areas needed to advance the SPM as a quantitative measurement tool: the universal availability of linearized piezo-scanners over the entire SPM product line, automated sampling for statistical process control, improved probe characteristics including tip-shape and wear properties, and a more complete understanding of the underlying physical and chemical interactions which affect sensitivity and image contrast were among the most often cited discussion topics. This report assesses the effectiveness of the workshop format and concludes with specific recommendations for a second, follow-up workshop.|
|Citation:||NIST Interagency/Internal Report (NISTIR) - 5550|
|Research Areas:||Metrology, Manufacturing|