TY - GEN AU - John Dagata AU - A Diebold AU - C Shih AU - R Colton C2 - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD DA - 1994-01-01 LA - en PB - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD PY - 1994 TI - A New Workshop Summary Report: Industrial Applications of Scanned Probe Microscopy ER -