@misc{95201,
  author = {John Dagata and A Diebold and C Shih and R Colton},
  title = {A New Workshop Summary Report: Industrial Applications of Scanned Probe Microscopy},
  year = {1994},
  month = {1994-01-01},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}