Kramar, J.
, Villarrubia, C.
, Teague, E.
, Scire, W.
and Penzes, W.
(1999),
Grating Pitch Measurements with the Molecular Measuring Machine, Proceedings of SPIE Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks Conference, Denver, CO
(Accessed April 18, 2024)
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Grating Pitch Measurements with the Molecular Measuring Machine
Published
Author(s)
, C Villarrubia, , W Scire,
Proceedings Title
Proceedings of SPIE Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks Conference
Volume
3806
Conference Dates
November 21-1, 1999
Conference Location
Denver, CO
Conference Title
SPIE Recent Advances in Metrology, Characterization and Standards for Optical Digital Data Disks Conference
Pub Type
Conferences
Keywords
measurements, molecualr measuring machine
Citation
Created November 1, 1999, Updated February 19, 2017