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Publication Citation: Grating Pitch Measurements with the Molecular Measuring Machine

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Author(s): John A. Kramar; C Villarrubia; E C. Teague; W Scire; William B. Penzes;
Title: Grating Pitch Measurements with the Molecular Measuring Machine
Published: November 01, 1999
Abstract:
Conference: SPIE Recent Advances in Metrology, Characterization and Standards for Optical Digital Data Disks Conference
Proceedings: Proceedings of SPIE Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks Conference
Volume: 3806
Pages: pp. 46 - 53
Location: Denver, CO
Dates: November 21-1, 1999
Keywords: measurements;molecualr measuring machine
Research Areas: Dimensional Metrology