| Author(s): |
John A. Kramar; C Villarrubia; E C. Teague; W Scire; William B. Penzes; |
| Title: |
Grating Pitch Measurements with the Molecular Measuring Machine |
| Published: |
November 01, 1999 |
| Abstract: |
|
| Conference: |
SPIE Recent Advances in Metrology, Characterization and Standards for Optical Digital Data Disks Conference |
| Proceedings: |
Proceedings of SPIE Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks Conference |
| Volume: |
3806 |
| Pages: |
pp. 46 - 53 |
| Location: |
Denver, CO |
| Dates: |
November 21-1, 1999 |
| Keywords: |
measurements;molecualr measuring machine |
| Research Areas: |
Dimensional Metrology |
