@conference{101866,
  author = {John Kramar and C Villarrubia and E Teague and W Scire and William Penzes},
  title = {Grating Pitch Measurements with the Molecular Measuring Machine},
  year = {1999},
  number = {3806},
  month = {1999-11-01},
  publisher = {Proceedings of SPIE Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks Conference, Denver, CO},
  language = {en},
}