TY  - CONF
AU  - John Kramar
AU  - C Villarrubia
AU  - E Teague
AU  - W Scire
AU  - William Penzes
C2  - Proceedings of SPIE Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks Conference, Denver, CO
DA  - 1999-11-01
LA  - en
M1  - 3806
PB  - Proceedings of SPIE Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks Conference, Denver, CO
PY  - 1999
TI  - Grating Pitch Measurements with the Molecular Measuring Machine
ER  -