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Publication Citation: Use of an Ion Energy Analyzer-Mass Spectrometer to Measure Ion Kinetic-Energy Distributions from RF Discharges in Argon-Helium Gas Mixtures

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Author(s): James K. Olthoff; Richard J. Van Brunt; S. B. Radovanov; J. A. Rees;
Title: Use of an Ion Energy Analyzer-Mass Spectrometer to Measure Ion Kinetic-Energy Distributions from RF Discharges in Argon-Helium Gas Mixtures
Published: March 01, 1994
Abstract:
Citation: Proceedings Sci. Meas. Technol. (Inst. of Electrical Engineers)
Volume: 141
Issue: 2
Pages: pp. 105 - 110
Research Areas: Electronics & Telecommunications
PDF version: PDF Document Click here to retrieve PDF version of paper (4MB)