Publication Citation
NIST Authors in Bold
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| Author(s): | James K. Olthoff; Richard J. Van Brunt; S. B. Radovanov; J. A. Rees; |
|---|---|
| Title: | Use of an Ion Energy Analyzer-Mass Spectrometer to Measure Ion Kinetic-Energy Distributions from RF Discharges in Argon-Helium Gas Mixtures |
| Published: | March 01, 1994 |
| Abstract: | |
| Citation: | Proceedings Sci. Meas. Technol. (Inst. of Electrical Engineers) |
| Volume: | 141 |
| Issue: | 2 |
| Pages: | pp. 105 - 110 |
| Research Areas: | Electronics & Telecommunications |
| PDF version: |  Click here to retrieve PDF version of paper (4MB) |