TY  - JOUR
AU  - James Olthoff
AU  - Richard Van Brunt
AU  - S. Radovanov
AU  - J. Rees
C2  - Proceedings Sci. Meas. Technol. (Inst. of Electrical Engineers)
DA  - 1994-03-01 00:03:00
LA  - en
M1  - 141
PB  - Proceedings Sci. Meas. Technol. (Inst. of Electrical Engineers)
PY  - 1994
TI  - Use of an Ion Energy Analyzer-Mass Spectrometer to Measure Ion Kinetic-Energy Distributions from RF Discharges in Argon-Helium Gas Mixtures
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=1903
ER  -