@article{769366,
  author = {James Olthoff and Richard Van Brunt and S. Radovanov and J. Rees},
  title = {Use of an Ion Energy Analyzer-Mass Spectrometer to Measure Ion Kinetic-Energy Distributions from RF Discharges in Argon-Helium Gas Mixtures},
  year = {1994},
  number = {141},
  month = {1994-03-01 00:03:00},
  publisher = {Proceedings Sci. Meas. Technol. (Inst. of Electrical Engineers)},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=1903},
  language = {en},
}