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You searched on: Topic Area: Characterization, Nanometrology, and Nanoscale Measurements

Displaying records 41 to 50 of 124 records.
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41. Intercomparison between optical and x-ray scatterometry measurements of FinFET structures
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 4/8/2013
Authors: Paul Lemaillet, Thomas Avery Germer, Regis J Kline, Daniel Franklin Sunday, Chengqing C. Wang, Wen-Li Wu
Abstract: In this paper, we present a comparison of profile measurements of vertical field effect transistor (FinFET) fin arrays by optical critical dimension (OCD) metrology and critical dimension small angle X-ray scattering (CD-SAXS) metrology. Spectroscopi ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913230

42. Robust Elemental Mapping of Nanostructures at Ultrahigh Resolution using Event-Streamed Spectrum Imaging in an Aberration-Corrected Analytical Electron Microscope
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 4/1/2013
Authors: Andrew A Herzing, Ian M. Anderson
Abstract: We detail the application of X-ray energy dispersive spectroscopy (XEDS) event-streamed spectral imaging (ESSI) in an aberration-corrected analytical electron microscope (AEM) as a reliable method for the acquisition of ultra-high spatial resolution ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910229

43. Metrology For Organic Monolayers On Cobalt Surfaces
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 3/27/2013
Authors: Sujitra Jeanie Pookpanratana, Leigh Kent Lydecker, Hyuk-Jae Jang, Curt A Richter, Christina Ann Hacker
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912903

44. Quantitative Characterization and Applications of A 193 nm Scatterfield Microscope
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 3/25/2013
Authors: Martin Y Sohn, Bryan M Barnes, Richard M Silver
Abstract: With decreasing feature sizes in semiconductor manufacturing, there is an acute demand for measurements of both critical dimensions (CD) and defects on the nanometer scale that must also be non-destructive measurement and provide high throughput1. Sc ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912991

45. Gold nanorod separation and characterization by asymmetric-flow field flow fractionation with UV-Vis detection
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 11/14/2012
Authors: Julien C. Gigault, Tae Joon Cho, Robert I. MacCuspie, Vincent A Hackley
Abstract: The application of asymmetrical-flow field flow fractionation (A4F) for gold nanorod (GNR) fractionation and characterization was comprehensively investigated. We report on two novel aspects of this application. The first addresses the analytical cha ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911860

46. Nanoscale Reference Materials for Environmental, Health, and Safety Measurements: Needs, Gaps, and Opportunities
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 11/7/2012
Authors: Aleksandr B. Stefaniak, Vincent A Hackley, Gert Roebben, Kensei Ehara, Steve Hankin, Michael T Postek, Iseult Lynch, Wei-En Fu, Thomas P.J. Linsinger, Andreas Th?nemann
Abstract: There is a need to understand and manage potential risks posed to workers, the public, and the environment from exposure to engineered nanomaterials. In response, several organizations have developed lists of relevant nano-objects and of physico-che ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910519

47. Quantifying Dithiothreitol Displacement of Functional Ligands from Gold Nanoparticles
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 10/27/2012
Authors: De-Hao D. Tsai, Frank W DelRio, Sherrie R. Elzey, Suvajyoti S. Guha, Michael Russel Zachariah, Vincent A Hackley, Melanie P Shelton
Abstract: Dithiothreitol (DTT)-based displacement is widely utilized for separating ligands from their gold nanoparticle (AuNP) conjugates, a critical step for differentiating and quantifying surface-bound functional ligands and therefore the effective surface ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911354

48. Temperature-dependent mechanical-resonance frequencies and damping in ensembles of gallium nitride nanowires
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 10/22/2012
Authors: Kristine A Bertness, Norman A Sanford, J. R. Montague, H.S. Park, Victor M. Bright, C. T. Rogers
Abstract: We have measured singly clamped cantilever mechanical-resonances in ensembles of as-grown gallium nitridenanowires (GaN NWs), from 12 K to 320 K. Resonance frequencies are approximately linearly dependent on temperature near 300 K ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910038

49. Aggregation/agglomeration state of carbon nanotubes
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 10/12/2012
Authors: Vivek M Prabhu, Toshiya Okazaki, Takeshi Eitoku, Masayoshi Tange, Haruhisa Kato
Abstract: Evaluation of aggregation and agglomeration of carbon nanotube (CNT) solution has been one of the key issues for applications. Here we introduce a simple method based on depolarized dynamic light scattering (DDLS) performed at multiple scattering ang ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=912177

50. UV-induced photochemical transformations of citrate capped silver nanoparticle suspensions
Topic: Characterization, Nanometrology, and Nanoscale Measurements
Published: 9/14/2012
Authors: Justin M Gorham, Robert I. MacCuspie, Kate L Klein, D Howard Fairbrother, Richard D Holbrook
Abstract: Due to the increasing use of silver nanoparticles (AgNPs) in consumer products, it is essential to understand how variables, such as light exposure, may change the physical and chemical characteristics of AgNP suspensions. To this end, the effect o ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911250



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