NIST logo

Publications Portal

You searched on: Topic Area: Nanomanufacturing

Displaying records 71 to 80 of 81 records.
Resort by: Date / Title

71. Damping mechanisms for precision applications in UHV environment
Topic: Nanomanufacturing
Published: 5/1/2006
Authors: Sumanth B. Chikkamaranahalli, R. R Vallance, Bradley N Damazo, Richard M Silver
Abstract: Surface analysis techniques such as scanning probe microscopy (SPM) have undergone significant advances and are attractive for application to electron and optical devices such as micro lenses, vacuum tubes, electron tubes, etc. For surface stability ...

72. Dynamic Modeling and Vibration Analysis of a UHV Scanning Tunneling
Topic: Nanomanufacturing
Published: 8/17/2005
Authors: Sumanth B. Chikkamaranahalli, R. R Vallance, Bradley N Damazo, Richard M Silver, James D Gilsinn
Abstract: Techniques based on scanning probe microscopy (SPM) are used to fabricate surface structures with dimensions ranging from 10 - 100mm. These structures have been fabricated and imaged using a scanning tunneling microscope (STM), and the STM requires ...

73. Optical Flatness Metrology for 300 mm Silicon Wafers
Topic: Nanomanufacturing
Published: 4/1/2005
Authors: Ulf Griesmann, Quandou Wang, T D Raymond
Abstract: At the National Institute of Standards and Technology (NIST), we are developing two interferometric methods for measuring the thickness variation and flatness of free-standing and chucked silicon wafers with diameters up to 300mm. The eXtremely accu ...

74. NIST's Logistics Integration Solutions
Series: Letter Circular
Topic: Nanomanufacturing
Published: 9/1/2004
Author: Sharon J. Kemmerer
Abstract: The NIST Manufacturing Interoperability Program staff has years of experience developing standards, validating solutions, and providing interoperability results in the field of manufacturing. Building on this experience, NIST can: (1) Work with indu ...

75. Nano-Lithography in Ultra-High Vacuum (UHV) for Real World Applications
Topic: Nanomanufacturing
Published: 3/1/2004
Authors: James D Gilsinn, Hui H. Zhou, Bradley N Damazo, Joseph Fu, Richard M Silver
Abstract: As nano-lithography technology improves, more companies and research groups have the capability to create nano-scale structures. Scanning tunneling microscopes (STMs) are commonly used to create these structures and evaluate them afterward. One diffi ...

76. New Method for the Measurement of SEM Stage Vibrations
Topic: Nanomanufacturing
Published: 2/1/2004
Authors: Bradley N Damazo, Crossley E Jayewardene, Andras Vladar, William J. Keery, Michael T Postek

77. An Overview of Nano-Micro-Meso Scale Manufacturing at NIST
Topic: Nanomanufacturing
Published: 1/1/2000
Authors: E Clayton Teague, Jun-Feng Song, Bradley N Damazo, John Evans, Matthew A. Davies, Nicholas G Dagalakis
Abstract: The Manufacturing Engineering Laboratory (MEL) has a unique mission of discrete part manufacturing technology within the National Institute of Standards and Technology''s (NIST) mission of measurement, standards, data and infrastructure technology. S ...

78. Laser focusing of atoms for nanostructure fabrication
Topic: Nanomanufacturing
Published: 1/1/1996
Authors: J Mcclelland, Robert Celotta, Zeina Jabbour Kubarych, R Gupta
Abstract: Laser focusing of atoms has emerged as a viable form of nanofabrication. Structures are formed by focusing chromium atoms as they deposit onto a surface. The focusing occurs in a standing-wave laser field in one or two dimensions, resulting in arrays ...

79. Nanofabrication of a two-dimensional array using laser-focused atomic deposition
Topic: Nanomanufacturing
Published: 6/27/1995
Authors: R Gupta, Robert Celotta, Zeina Jabbour Kubarych, J Mcclelland
Abstract: Fabrication of a two-dimensional array of nanometer-scale chromium features on a silicon substrate by laser-focused atomic deposition is described. Features 13? 1 nm high and having a full-width at half maximum of 80? 10 nm are fabricated in a square ...

80. Capacitive readout technique for studies of dissipation in GaN nanowire mechanical resonators
Topic: Nanomanufacturing
Published: Date unknown
Authors: Kristine A Bertness, Joshua R. Montague, Norman A Sanford, Victor Bright, C. T. Rogers
Abstract: A variable-temperature, homodyne reflectometry measurement technique for detecting nanoscale mechanical motion has recently been developed. We have extended this technique to make the first all-electrical measurements of an ensemble of as-grown, c-a ...

Search NIST-wide:

(Search abstract and keywords)

Last Name:
First Name:

Special Publications:

Looking for a NIST Special Publication (NIST SP Series)? Place the series number and dash in the report number field (Example: 800-) and begin your search.

  • SP 250-XX: Calibration Services
  • SP 260-XX: Standard Reference Materials
  • SP 300-XX: Precision Measurement and Calibration
  • SP 400-XX: Semiconductor Measurement Technology
  • SP 480-XX: Law Enforcement Technology
  • SP 500-XX: Computer Systems Technology
  • SP 700-XX: Industrial Measurement Series
  • SP 800-XX: Computer Security Series
  • SP 823-XX: Integrated Services Digital Network Series