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Topic Area: Metrology

Displaying records 821 to 830 of 851 records.
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821. Force Calibrations in the Nanonewton Regime
Topic: Metrology
Published: 1/1/1994
Authors: Lowell P. Howard, E Clayton Teague
Abstract: An instrument is described which is shown capable of making preliminary measurements of nanonewton forces. A technique is described which allows absolute calibrations of small forces to be made in terms of electrical measurements.

822. Hertzian Contact Resonances
Topic: Metrology
Published: 1/1/1994
Authors: John A Kramar, T Mcwaid, J Schneir, E Clayton Teague
Abstract: The resonant frequency of a sphere in contact with a flat surface was measured as a function of loading force for contacting materials with different elastic moduli. Comparisons were made with predictions based on the Hertzian theory of elastic defor ...

823. In Situ Tip Characterization for AFM and Application to Linewidth Metrology
Topic: Metrology
Published: 1/1/1994
Authors: Ronald G Dixson, J Schneir, T Mcwaid, Theodore Vincent Vorburger
Abstract: Abstract not available.

824. Methods Divergence Between Measurements of Micrometer and Sub-Micrometer Surface Features
Topic: Metrology
Published: 1/1/1994
Authors: T Mcwaid, Theodore Vincent Vorburger, Joseph Fu, Jun-Feng Song, Eric Paul Whitenton
Abstract: Measurements of micrometer and sub-micrometer surface features have been made using a stylus profiler, an STM, an AFM, and a phase-measuring interferometric microscope. The differences between measurements of the same surface feature as obtained with ...

825. Microform Calibrations in Surface Metrology
Topic: Metrology
Published: 1/1/1994
Authors: Jun-Feng Song, F Rudder, Theodore Vincent Vorburger, A Hartman, Brian R Scace, J Smith
Abstract: Microform calibrations include the measurement of complex profile forms and position errors of micrometer scale in combination with the measurement of deviations from a specified profile and surface texture of profile segments. Tolerances on the prof ...

826. Morphological Estimation of Tip Geometry for Scanned Probe Microscopy
Topic: Metrology
Published: 1/1/1994
Author: John S Villarrubia
Abstract: Morphological constraints inherent in the imaging process limit the possible shapes of the tip with which any given tunneling microscope or atomic force microscope image could have been taken. Broad tips do not produce narrow image protrusions. There ...

827. Photomask Linewidth Measurement Uncertainty: An Alternative Approach via Stepper Emulation
Topic: Metrology
Published: 1/1/1994
Author: James Edward Potzick
Abstract: The most significant contribution to uncertainty in the measurement of photomask linewidths is the rough shape of the edge of the etched chrome lines. This uncertainty can be greatly reduced if the emulated stepper aerial image of the feature is meas ...

828. Precision Engineering/Precision Optics in Japan:  Status, Technology and Culture
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 5491
Topic: Metrology
Published: 1/1/1994
Author: Christopher J. Evans
Abstract: Precision engineering and precision optics are commercially and strategically important enabling technologies. The character of precision engineering research and development in Japan is different from that in the U.S. and Europe; these differences a ...

829. Rapid Post-Polishing of Diamond-Turned Optics
Topic: Metrology
Published: 1/1/1994
Authors: R E. Parks, Christopher J. Evans
Abstract: A simple technique for post-polishing single-point, diamond-turned optics is described. Synthetic fabric-faced laps are used. Surface finish converges to a limiting value set by process parameters. Lap construction and diamond grit size affects both ...

830. Scanning Electron Microscope Metrology
Topic: Metrology
Published: 1/1/1994
Author: Michael T Postek
Abstract: During the manufacturing of present-day integrated circuits, certain measurements must be made of the submicrometer structures composing the device with a high degree of precision. Optical microscopy, scanning electron microscopy and the various form ...

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