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You searched on: Author: john villarrubia

Displaying records 61 to 70 of 92 records.
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61. Advancing Nanoscale Indentation Measurements Toward Quantitative Characterization of Polymer Properties
Published: 1/1/2000
Authors: Mark R VanLandingham, John S Villarrubia, G Meyers, M Dineen
Abstract: The ultimate objective of instrumented indentation testing is to obtain absolute measurements of material properties and behavior. To achieve this goal, accurate knowledge of the shape of the indenter tip is required. For indentation measurements inv ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820986

62. Experimental Test of Blind Tip Reconstruction for Scanning Probe Microscopy
Published: 1/1/2000
Authors: Samuel Dongmo, John S Villarrubia, Samuel N Jones, Thomas B Renegar, Michael T Postek, Jun-Feng Song
Abstract: Determination of the tip geometry is a prerequisite to converting the scanning probe microscope (SPM) from a simple imaging instrument to a tool that can perform width measurements accurately. Recently we developed blind reconstruction, a method to c ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820960

63. Final Report: 1998-1999 NIST/SEMATECH Project on Intercomparison of Linewidth Measurement Methods
Published: 1/1/2000
Authors: John S Villarrubia, Ronald G Dixson, Samuel N Jones, J R. Lowney, Michael T Postek
Abstract: Abstract unavailable.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820988

64. Nanoindentation of Polymers: Tip Shape Calibration and Uncertainty Issues
Published: 1/1/2000
Authors: Mark R VanLandingham, John S Villarrubia, G Meyers
Abstract: Indentation measurements made with atomic force microscopy (AFM) probes are relative measurements, largely due to the lack of information regarding the tip shape of the AFM probes. Also, current tip shape calibration procedures used in depth-sensing ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820984

65. Recent Progress in Nanoscale Indentation of Polymers Using the AFM
Published: 1/1/2000
Authors: Mark R VanLandingham, John S Villarrubia, G Meyers
Abstract: Regardless of the type of test, reliable indentation measurements require knowledge of the shape of the indenter tip. For indentation measurements involving sub-micrometer scale contacts, accurate knowledge of the tip shape can be difficult to achiev ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820985

66. Grating Pitch Measurements With the Molecular Measuring Machine
Published: 11/1/1999
Authors: John A Kramar, Jay Shi Jun, William B. Penzes, Fredric Scire, E Clayton Teague, John S Villarrubia
Abstract: At the National Institute of Standards and Technology, we are building a metrology instrument called the Molecular Measuring Machine (M^3) with the goal of performing nanometer- accuracy two-dimensional feature placement measurements over a 50 mm by ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820932

67. Intercomparison of SEM, AFM, and Electrical Linewidths
Published: 9/1/1999
Authors: John S Villarrubia, R. Dixon, S. Jones, J R. Lowney, Michael T Postek, Richard A Allen, Michael W. Cresswell
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=22631

68. Intercomparison of SEM, AFM, and Electrical Linewidths
Published: 6/1/1999
Authors: John S Villarrubia, Ronald G Dixson, Samuel N Jones, J R. Lowney, Michael T Postek, Richard A Allen, Michael W. Cresswell
Abstract: Uncertainty in the locations of line edges dominates the uncertainty budget for high quality sub-micrometer linewidth measurements. For microscopic techniques like scanning electron microscopy (SEM) and atomic force microscopy (AFM), the image of the ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820954

69. Toward Nanometer Accuracy Measurements
Published: 6/1/1999
Authors: John A Kramar, E Amatucci, David E. Gilsinn, Jay Shi Jun, William B. Penzes, Fredric Scire, E Clayton Teague, John S Villarrubia
Abstract: We at NIST are building a metrology instrument called the Molecular Measuring Machine (MMM) with the goal of performing 2D point-to-point measurements with one nanometer accuracy cover a 50 mm by 50 mm area. The instrument combines a scanning tunneli ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820933

70. A Strategy for Faster Blind Reconstruction of Tip Geometry for Scanned Probe Microscopy
Published: 3/1/1999
Author: John S Villarrubia
Abstract: In scanned probe microscopy, it is necessary to know the tip's geometry in order to correct image distortions due to its finite size. Heretofore, methods have focused upon determining the tip geometry by erosion of a tip characterizer of known geomet ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822529



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