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Author: john villarrubia

Displaying records 61 to 70 of 82 records.
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61. Tip Characterization for Dimensional Nanometrology
Published: 1/1/1999
Author: John S Villarrubia
Abstract: Technological trends are increasingly requiring dimensional metrology at size scales below a micrometer. Scanning probe microscopy has unique advantages in this size regime, but width and roughness measurements must be corrected for imaging artifacts ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822459

62. Developing a Method to Determine Linewidth Based on Counting the Atom-Spacings Across a Line
Published: 6/1/1998
Authors: Richard M Silver, Carsten P. Jensen, V W. Tsai, Joseph Fu, John S Villarrubia, E Clayton Teague
Abstract: We are developing the instrumentation and prototype samples at NIST to enable the counting of atom-spacings across linewidth features etched in silicon. This is an effort to allow the accurate counting of atom-spacings across a feature in a controlle ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820909

63. Strategy for Faster Blind Reconstruction of Tip Geometry for Scanned Probe Microscopy
Published: 6/1/1998
Author: John S Villarrubia
Abstract: In scanned probe microscopy, it is necessary to know the tip's geometry in order to correct image distortions due to its finite size. Heretofore, methods have focused upon determining the tip shape by erosion of a tip characterizer of known geometry ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820919

64. Tip Characterization for Scanned Probe Microscope Width Metrology
Published: 3/1/1998
Authors: Samuel Dongmo, John S Villarrubia, Samuel N Jones, Thomas B Renegar, Michael T Postek, Jun-Feng Song
Abstract: Determination of the tip shape is an important prerequisite for converting the various scanning probe microscopies form imaging tools into dimensional metrology tools with sufficient accuracy to meet the critical dimension measurement requirements of ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823092

65. Blind Estimation of Tip Geometry in Scanned Probe Microscopy
Published: 8/1/1997
Author: John S Villarrubia
Abstract: Broadening of surface protrusions is a well-known imaging artifact in scanned probe microscope topographs. Blind reconstruction is a method for estimating the tip shape from the image of a tip characterizer, without independent knowledge of the chara ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820880

66. Algorithm for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation
Series: Journal of Research (NIST JRES)
Published: 7/1/1997
Author: John S Villarrubia
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823084

67. Algorithms for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation
Published: 7/1/1997
Author: John S Villarrubia
Abstract: To the extent that tips are not perfectly sharp, images produced by scanned probe microscopies (SPM) such as atomic force microscopy and scanning tunneling microscopy are only approximations of the specimen surface. Tip-induced distortions are signif ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820879

68. Characterization of Multi-phase and Multi-component Polymers using the Atomic Force Microscope
Published: 1/1/1997
Authors: Mark R VanLandingham, John S Villarrubia, G Meyers, M Dineen
Abstract: Abstract not available.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=821592

69. Experimental Results of Blind Reconstruction of STM Tips
Published: 1/1/1997
Authors: Carsten P. Jensen, Richard M Silver, John S Villarrubia
Abstract: Abstract not available.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820896

70. Tip and Surface Reconstruction in Scanned Probe Microscopy
Published: 1/1/1997
Author: John S Villarrubia
Abstract: The non-vanishing size of tips in scanned probe microscopes (e.g., atomic force microscope or scanning tunneling microscope) results in imaging errors. Correction of these errors requires estimation of the tip shape (tip reconstruction) followed by e ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820881