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Author: joaquin martinez
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1. Advanced Metrology for Nanoelectronics at the National Institute of Standards and Technology
Published: 3/11/2009
Authors: Joaquin (Jack) Martinez, Yaw S Obeng, Stephen Knight
Abstract: A broad range of programs at the National Institute of Standards and Technology address critical metrology and characterization challenges facing the nanoelectronics industry. A brief history of the program will be included. From these programs we ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=901409

2. CD Reference Materials for Sub-Tenth Micrometer Applications
Published: 6/1/2002
Authors: Michael W Cresswell, E. Hal Bogardus, Joaquin (Jack) Martinez, Marylyn H. Bennett, Richard A Allen, William F Guthrie, Christine E. Murabito, B A am Ende, Loren W. Linholm
Abstract: Prototype linewidth reference materials with Critical Dimensions (CDs) as narrow as 70 nm have been patterned in (110) silicon-on-insulator films. The sidewalls of the reference features are parallel, normal to the substrate surface, and have almost ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=12043

3. Challenges in Metrology for the Semiconductor Industry
Published: 3/21/2005
Authors: Stephen Knight, Joaquin (Jack) Martinez
Abstract: Leading edge Ultra Large Scale Integrated Circuit manufacture is now well into the realm of Nanoelectronics, with some critical dimensions below 40 nm. The pressures on metrology supporting this manufacture are escalating rapidly. In this presentatio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31889

4. Critical Dimension Reference Features with Sub-Five Nanometer Uncertainty
Published: 5/30/2005
Authors: Michael W Cresswell, Ronald G Dixson, William F Guthrie, Richard A Allen, Christine E. Murabito, Brandon Park, Joaquin (Jack) Martinez, Amy Hunt
Abstract: The implementation of a new type of HRTEM-imaging (High-Resolution Transmission Electron Microscopy) test structure, and the use of CD-AFM (CD-Atomic Force Microscopy) to serve as the transfer metrology have resulted in reductions in the uncertaintie ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31923

5. ECS Transactions
Published: 5/18/2008
Authors: Yaw S Obeng, Stephen Knight, Joaquin (Jack) Martinez
Abstract: Nanoelectronics require the introduction of several new uncharacterized material(s) combinations and new processing techniques. The critical metrology and characterization needs of the nanoelectronics industry are being addressed with a broad range o ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=32939

6. Interim Report on Single Crystal Critical Dimension Reference Materials (SCCDRM)
Published: 1/1/2004
Authors: Ronald G Dixson, Michael W Cresswell, Richard A Allen, William F Guthrie, Brandon Park, Christine E. Murabito, Joaquin (Jack) Martinez
Abstract: The single crystal critical dimension reference materials (SCCDRM) project has been completed, and the samples for the SEMATECH member companies have been released for distribution.  The final technology transfer report is currently undergoing r ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=822245

7. Metrology Development for the Nanoelectronics Industry at the National Institute of Standards and Technology
Published: 3/7/2004
Authors: Joaquin (Jack) Martinez, John A Dagata, Curt A Richter, Richard M Silver
Abstract: The National Institute of Standards and Technology has provided and continues to provide critical metrology development for the semiconductor manufacturing industry as it moves from the microelectronic era into the nanoelectronic era. This presentaio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31539

8. Office of Microelectronics Programs (Programs, Activities and Accomplishments)
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 7367
Published: 12/14/2006
Authors: Stephen Knight, Joaquin (Jack) Martinez, Michele L. Buckley
Abstract: The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The N ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=32517

9. Office of Microelectronics Programs - Programs, Activities, and Accomplishments
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: NISTIR7171
Published: 1/1/2005
Authors: Stephen Knight, Joaquin (Jack) Martinez, Michele L. Buckley
Abstract: The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. That ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=31836

10. Office of Microelectronics Programs 2003 Programs, Activities, and Accomplishments
Series: NIST Interagency/Internal Report (NISTIR)
Report Number: 6934
Published: 1/1/2003
Authors: Stephen Knight, Joaquin (Jack) Martinez, Michele L. Buckley
Abstract: Many of the projects managed by OMP are cooperative activities across several operating units. Thus the projects are able to leverage the best expertise available for the specific task across NIST, regardless of organizational structure. Our projects ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=30891



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