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Author: joseph kopanski

Displaying records 71 to 80 of 107 records.
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71. Intermittent-Contact Scanning Capacitance Microscope for Lithographic Overlay Measurement
Published: 5/11/1998
Authors: Joseph J Kopanski, Santos D Mayo
Abstract: A new scanning capacitance microscope (SCM) mode was implemented by using an atomic force microscope (AFM) operated in intermittent contact and by measuring the tip-to-sample capacitance change at the tip vibration frequency. The intermittent-contac ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=11031

72. A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements
Published: 2/1/1998
Authors: Jay F. Marchiando, Joseph J Kopanski, J R. Lowney
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=26143

73. Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles Across Junctions
Published: 1/1/1998
Authors: Joseph J Kopanski, Jay F. Marchiando, David W. Berning, R. Alvis, H. E. Smith
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=26626

74. A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements
Published: 12/31/1997
Authors: Jay F. Marchiando, Joseph J Kopanski, J R. Lowney
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=8738

75. Models for Interpreting Measurements Scanning Capacitance Microscope Measurements
Published: 12/31/1997
Authors: Jay F. Marchiando, J R. Lowney, Joseph J Kopanski
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=28178

76. Practical Metrology Aspects of Scanning Capacitance Microscopy for Silicon 2-D Dopant Profiling, Condensed version
Published: 12/31/1997
Authors: Joseph J Kopanski, Jay F. Marchiando, R. Alvis
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=8962

77. Scanning Capacitance Microscopy Applied to 2D Dopant Profiling of Semiconductors
Published: 12/31/1997
Authors: Joseph J Kopanski, Jay F. Marchiando, J R. Lowney
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=8618

78. Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles across Junctions
Published: 12/31/1997
Authors: Joseph J Kopanski, Jay F. Marchiando, David W. Berning
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=3316

79. Scanning Capacitance Microscopy Measurements and Modeling for Dopant Profiling of Silicon
Published: 12/31/1996
Authors: Joseph J Kopanski, Jay F. Marchiando, J R. Lowney
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=13654

80. Characterization of Two-Dimensional Dopant Profiles: Status and Review
Published: 2/1/1996
Authors: Alain C. Diebold, M. Kump, Joseph J Kopanski, David G Seiler
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=28378



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