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Author: ronald jones

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61. Structural Characterization of Deep Sub-Micron Lithographic Structures Using Angle Neutron Scattering
Published: Date unknown
Authors: Eric K Lin, Ronald Leland Jones, Wen-Li Wu, John Barker, P J Bolton, G G Barclay
Abstract: As critical dimensions continue to decrease with each technology node, the precise characterization of line width and profile becomes an increasingly challenging task. Small angle neutron scattering (SANS) offers several advantages for the characteri ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=852013



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