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You searched on: Author: william guthrie

Displaying records 51 to 60 of 83 records.
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51. Reference Material 8457, Ultra High Molecular Weight Polyethylene 0.5 cm Cubes
Published: 5/1/2003
Authors: B M Fanconi, J A Tesk, William F Guthrie
Abstract: The geometric and surface features of a new NIST reference material, RM 8457 are presented. This reference material is composed of Ultra High Molecular Weight Polyethylene (UHMWPE) in the form of 5 mm cubes. These cubes are intended for use in swell ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=50795

52. Test Structures for Referencing Electrical Linewidth Measurements to Silicon Lattice Parameters Using HRTEM
Published: 5/1/2003
Authors: Richard A Allen, B A. am Ende, Michael W. Cresswell, Christine E. Murabito, T J. Headley, William F Guthrie, Loren W. Linholm, Colleen E. Hood, E. Hal Bogardus
Abstract: A technique has been developed to determine the linewidths of the features of a prototype reference material for the calibration of CD (Critical-Dimension) metrology instruments. The reference features are fabricated in mono-crystalline-silicon with ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=30085

53. Reference Material 8457, Ultra High Molecular Weight Polyethylene 0.5 cm Cubes
Published: 4/1/2003
Authors: B M Fanconi, John A Tesk, William F Guthrie
Abstract: The geometric and surface features of a new NIST reference material, RM 8457 are presented. This reference material is composed of Ultra High Molecular Weight Polyethylene (UHMWPE) in the form of 5 mm cubes. These cubesare intended for use in swelli ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=852105

54. Handbook 151: NIST/SEMATECH e-Handbook of Statistical Methods
Series: NIST Interagency/Internal Report (NISTIR)
Published: 11/1/2002
Authors: Nathanael A Heckert, James J Filliben, C M. Croarkin, B Hembree, William F Guthrie, P Tobias, J Prinz
Abstract: The URL is http://www.itl.nist.gov/div898/handbook/mpc/mpc.htm. This is a web based guide to statistical methods for engineering. It involves case studies with interactive software for analysis.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=50798

55. CD Reference Materials for Sub-Tenth Micrometer Applications
Published: 6/1/2002
Authors: Michael W. Cresswell, E. Hal Bogardus, Joaquin (Jack) Martinez, Marylyn H. Bennett, Richard A Allen, William F Guthrie, Christine E. Murabito, B A. am Ende, Loren W. Linholm
Abstract: Prototype linewidth reference materials with Critical Dimensions (CDs) as narrow as 70 nm have been patterned in (110) silicon-on-insulator films. The sidewalls of the reference features are parallel, normal to the substrate surface, and have almost ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=12043

56. Test Structures for Referencing Electronics Linewidth Measurements to Silicon Lattice Parameters Using HRTEM
Published: 4/8/2002
Authors: Richard A Allen, Michael W. Cresswell, Christine E. Murabito, William F Guthrie, Loren W. Linholm, Colleen E. Hood, E. Hal Bogardus
Abstract: A technique has been developed to certify the linewidths of the features of a prototype reference materials for the calibration of CD (Critical-Dimension) metrology instruments. The reference features are fabricated in mono-crystalline-silicon with ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=8663

57. Measurement of the Linewidth of Electrical Test-Structure Reference Features by Automated Phase-Contrast Image Analysis
Published: 4/1/2002
Authors: B A. am Ende, Michael W. Cresswell, Richard A Allen, T J Headley, William F Guthrie, Loren W. Linholm, H Bogardus, Christine E. Murabito
Abstract: NIST, Sandia National Laboratories, and International SEMATECH are developing a new type of linewidth standard for calibrating Critical Dimension (CD) metrology instruments for lithographic process control. The standard reference feature is the bri ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=50975

58. Measurement of the Linewidth of Electrical Test-Structure Reference Features by Automated Phase-Contrast Image Analysis
Published: 4/1/2002
Authors: B A. am Ende, Michael W. Cresswell, Richard A Allen, T J. Headley, William F Guthrie, Loren W. Linholm, E. Hal Bogardus, Christine E. Murabito
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=30751

59. Summary of Comparison of Realizations of the ITS-90 Over the Range 83.8058 K to 933.473 K: CCT Key Comparison CCT-K3
Published: 4/1/2002
Authors: Billy Wilson Mangum, Gregory F Strouse, William F Guthrie, R Pello, M F Stock, E Renaot, Y Hermier, G Bonnier, P Marcarino, K S Gam, K H Kang, Y G Kim, J V Nicholas, D. R White, T D Dransfield, Y Duan, Y Qu, J Connolly, R L Rusby, J Gray, G J Sutton, D I Head, K D Hill, A G Steele, K Nara, Tony J. Tegeler, U Noatsch, D Heyer, B Fellmuth, B Thiele-Krivoj, S Duris, A I Pokhodun, N P Moiseeva, A G Ivanova, P A. de Groot, J F Dubbeldam
Abstract: This is a report to the Comite Consultatif de Thermometrie (CCT) on Key Comparison 3, i.e., the comparison of realizations of the ITS-90 over the range 83.8058 K to 933.473 K. The differences in the realizations of the various fixed points in this r ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=830745

60. CD Reference Materials for Sub-Tenth Micrometer Applications
Published: 3/1/2002
Authors: Richard A Allen, Michael W. Cresswell, William F Guthrie, Loren W. Linholm, H Bogardus, J V Martinez de pinillos, B A Am ende, Christine E. Murabito, M H Bennett
Abstract: Prototype linewidth reference materials with Critical Dimensions (CDs) as narrow as 70 nm have been patterned in (110) silicon-on-insulator films. The sidewalls of the reference features are parallel, normal to the substrate surface, and have almost ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=50973



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