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Author: ulf griesmann
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1. Holographic radius test plates for spherical surfaces with large radius of curvature
Published: 7/9/2014
Authors: Quandou Wang, Ulf Griesmann, Johannes A Soons
Abstract: We describe a novel interferometric method, based on nested Fresnel zone lenses or photon sieves, for testing and measuring the radius of curvature of precision spherical surfaces that have radii in a range between several meters to few hundred meter ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913959

2. Figure metrology for x-ray focusing mirrors with Fresnel holograms and photon sieves
Published: 6/20/2014
Authors: Ulf Griesmann, Johannes A Soons, Quandou Wang, Lahsen Assoufid
Abstract: We report on interferometric measurements of the figure error of an ultra-precise mirror with the shape of an elliptical toroid for the diffraction limited focusing of hard x-rays from an undulator x-ray source. We describe measurement configuratio ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914758

3. A versatile bilayer resist for laser lithography at 405 nm on glass substrates
Published: 10/23/2013
Authors: Quandou Wang, Ulf Griesmann
Abstract: We describe a simple bilayer photoresist that is particularly well suited for laser lithography at an exposure wavelength of 405 nm on glass substrates, which is often used for the fabrication of binary diffractive optics and computer generated holog ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=913532

4. Holographic Radius Test Plates
Published: 9/7/2013
Authors: Quandou Wang, Johannes A Soons, Ulf Griesmann
Abstract: We evaluate a method for testing the radius of spheres with a hologram that consists of a pair of nested Fresnel zone lenses. The hologram is positioned in the collimated test beam of a Fizeau interferometer. The inner zone lens generates a focus at ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=914508

5. Absolute interferometric tests of spherical surfaces based on rotational and translational shears
Published: 9/13/2012
Authors: Johannes A Soons, Ulf Griesmann
Abstract: Traceability of interferometric form measurements requires characterization of the reference wavefront. We investigate absolute tests for spherical surfaces where the form errors of both reference and test surface are estimated by minimizing the diff ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911749

6. Measurement of the diameter variation and refractive index inhomogeneity of a fused silica sphere using four-surface phase-shifting interferometry
Published: 9/9/2012
Authors: Chu-Shik Kang, Ulf Griesmann, Johannes A Soons
Abstract: The diameter variation and refractive index inhomogeneity of a fused silica sphere were measured with a frequency-shifting Fizeau interferometer in a four-surface configuration. The phase-shifting algorithms to analyze the interference signals for ea ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911048

7. Phase-shifting algorithms for the interferometric measurement of form error, diameter variation and refractive index inhomogeneity of fused silica spheres
Published: 9/9/2012
Authors: Chu-Shik Kang, Ulf Griesmann, Johannes A Soons
Abstract: High-precision spheres have many applications in precision engineering and metrology, such as the calibration of transmission spheres for interferometry, density standards for mass metrology, and spherical gyroscope rotors. For these applications it ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=910820

8. A modified Roberts-Langenbeck test for measuring thickness and refractive index variation of silicon wafers
Published: 8/17/2012
Authors: Jungjae Park, Lingfeng Chen, Quandou Wang, Ulf Griesmann
Abstract: We describe a method to simultaneously measure thickness variation and refractive index homogeneity of 300 mm diameter silicon wafers using a wavelength shifting Fizeau interferometer operating at 1550 nm. Only three measurements are required, corres ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=911565

9. Plasma Etching Uniformity Control for Making Large and Thick Dual-Focus Zone Plates
Published: 8/1/2011
Authors: Lei Chen, Quandou Wang, Ulf Griesmann
Abstract: A typical zone plate structure is composed of concentric rings with a radially decreasing feature size such that the path of light through every second zone to the focus differs by one optical wavelength. In order to achieve the highest possible diff ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=906649

10. Binary amplitude holograms made from dyed photoresist
Published: 5/13/2011
Authors: Quandou Wang, Ulf Griesmann, John H Burnett
Abstract: A method for fabricating binary amplitude holograms from a dyed photoresist is described. It is of particular interest for holograms that are used as null lenses in the form metrology of aspheric surfaces and wavefronts. A pigment that stron ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=907217



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