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Author: ronald dixson

Displaying records 91 to 100 of 116 records.
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91. Final Report: 1998-1999 NIST/SEMATECH Project on Intercomparison of Linewidth Measurement Methods
Published: 1/1/2000
Authors: John S Villarrubia, Ronald G Dixson, Samuel N Jones, J R. Lowney, Michael T Postek
Abstract: Abstract unavailable.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820988

92. Interferometric Calibration of a Capacitance Displacement Sensor Over Short Displacement Ranges
Published: 1/1/2000
Authors: R Koning, Ronald G Dixson, Joseph Fu, G S Peng, Theodore Vincent Vorburger
Abstract: Capacitance displacement sensors, which are widely used to measure and control the true extension of piezoelectric actuators, have to be calibrated, if they are to be used for measurement purposes. We have investigated the calibration of a capacitanc ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820964

93. The Role of Periodic Interferometer Errors in the Calibration of Capacitance Displacement Sensors for Nanometrology Applications
Published: 1/1/2000
Authors: R Koning, Ronald G Dixson, Joseph Fu, Theodore Vincent Vorburger
Abstract: Although the role of the periodic errors of optical heterodyne interferometers in displacement measurements is fairly well understood, their influence on the calibration of other types of displacement sensors do not seem to be studied as extensively. ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820965

94. Step Height Metrology for Data Storage Applications
Published: 11/1/1999
Authors: R Koning, Ronald G Dixson, Joseph Fu, Thomas B Renegar, Theodore Vincent Vorburger, V W. Tsai, Michael T Postek
Abstract: The measurements of bump heights and pit depth on compact discs (CD) with atomic force microscopes (AFMs) are quite different from the measurement of step heights on step height calibration standards.  Both the bumps and the pits show much large ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823118

95. Step-height Metrology for Data Storage Applications
Published: 11/1/1999
Authors: R Koning, Ronald G Dixson, Joseph Fu, Thomas B Renegar, Theodore Vincent Vorburger, V W. Tsai, Michael T Postek
Abstract: The measurement of bump heights and pit depth on compact discs (CD) with atomic force microscopes (AFMs) is quite different from the measurement of step heights on step height calibration standards. Both the bumps and the pits show much larger transi ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820931

96. Dimensional Metrology with the NIST Calibrated Atomic Force Microscope
Published: 6/1/1999
Authors: Ronald G Dixson, R Koning, V W. Tsai, Joseph Fu, Theodore Vincent Vorburger
Abstract: Atomic force microscopes (AFMs) are increasingly used in the semiconductor industry as tools for submicrometer dimensional metrology. The scales of an AFM must be calibrated in order to perform accurate measurements. We have designed and developed th ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820926

97. Intercomparison of SEM, AFM, and Electrical Linewidths
Published: 6/1/1999
Authors: John S Villarrubia, Ronald G Dixson, Samuel N Jones, J R. Lowney, Michael T Postek, Richard A Allen, Michael W Cresswell
Abstract: Uncertainty in the locations of line edges dominates the uncertainty budget for high quality sub-micrometer linewidth measurements. For microscopic techniques like scanning electron microscopy (SEM) and atomic force microscopy (AFM), the image of the ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820954

98. Algorithms for Calculating Single-Atom Step Heights
Published: 1/1/1999
Authors: Joseph Fu, V W. Tsai, R Koning, Ronald G Dixson, Theodore Vincent Vorburger
Abstract: Recently, measuring Si(111) single atomic steps prompted us to investigate the measuring technique. The section technique is the most popular method for measuring the height. By measuring a simulated Si(111) atomic step, we have found it could have a ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820930

99. Improving Pitch and Step Height Measurements Using the Calibrated Atomic Force Microscope
Published: 11/1/1998
Authors: R Koning, Ronald G Dixson, Joseph Fu, V W. Tsai
Abstract: No abstract.
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=823080

100. Measurement of Pitch and Width Samples with the NIST Calibrated Atomic Force Microscope
Published: 6/1/1998
Authors: Ronald G Dixson, R Koning, Theodore Vincent Vorburger, Joseph Fu, V W. Tsai
Abstract: Because atomic force microscopes (AFMs) are capable of generating three dimensional images with nanometer level resolution, these instruments are being increasingly used in many industries as tools for dimensional metrology at sub- micrometer length ...
http://www.nist.gov/manuscript-publication-search.cfm?pub_id=820889



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