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Publication Citation: Nanoparticle Size and Shape Evaluation Using the TSOM Method

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Author(s): Bradley N. Damazo; Ravikiran Attota; Premsagar P. Kavuri; Andras Vladar;
Title: Nanoparticle Size and Shape Evaluation Using the TSOM Method
Published: June 01, 2012
Abstract: A novel through-focus scanning optical microscopy (TSOM) method that yields nanoscale information from optical images obtained at multiple focal planes will be used here for nanoparticle dimensional analysis. The TSOM method can distinguish not only size differences but also shape differences among nanoparticles. Size evaluation based on simulations will be presented along with experimental data for nanoparticles and nanodots with sizes below 100 nm. Size determination using an experimentally created library will also be presented.
Conference: SPIE Advanced Lithography
Proceedings: Metrology, Inspection,and Process Control for Microlithography XXVI
Location: San Jose, CA
Dates: February 12-17, 2012
Keywords: TSOM, optical microscope, through-focus, nanoparticles, nanometrology
Research Areas: Nanotechnology, Characterization, Nanometrology, and Nanoscale Measurements