@conference{31931,
  author = {Bradley Damazo and Ravikiran Attota and Premsagar Kavuri and Andras Vladar},
  title = {Nanoparticle Size and Shape Evaluation Using the TSOM Method},
  year = {2012},
  month = {2012-06-01},
  publisher = {Metrology, Inspection,and Process Control for Microlithography XXVI, San Jose, CA},
  language = {en},
}