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Publication Citation: AFM characterization of nanopositioner in-plane stiffnesses

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Author(s): Seung Ho Yang; Yong Sik Kim; Premsagar P. Kavuri; Jae M. Yoo; Young M. Choi; Nicholas G. Dagalakis;
Title: AFM characterization of nanopositioner in-plane stiffnesses
Published: August 19, 2010
Abstract: A versatile method for measurement of in-plane stiffness of micro-elements was developed and its usefulness has been demonstrated. The in-plane stiffness of a NIST nanopositioner has been measured directly using a colloidal probe in an AFM without any fixture. Using this method it was possible to measure the in-plane stiffness at different locations of the same micro-element. The in-plane stiffness ratio of a micro lever system was also measured and a good agreement was found between the calculated and measured values. Further, when the minimum width of flexures is 4 m, the measured in-plane stiffnesses showed a close agreement with the calculated value.
Citation: Sensors and Actuators A: Physical
Volume: 163
Pages: pp. 383 - 387
Keywords: AFM, colloidal probe, in-plane stiffness, MEMS, nanopositioner
Research Areas: Manufacturing, Nanomanufacturing
PDF version: PDF Document Click here to retrieve PDF version of paper (701KB)