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|Author(s):||Seung Ho Yang; Yong Sik Kim; Premsagar P. Kavuri; Jae M. Yoo; Young M. Choi; Nicholas G. Dagalakis;|
|Title:||AFM characterization of nanopositioner in-plane stiffnesses|
|Published:||August 19, 2010|
|Abstract:||A versatile method for measurement of in-plane stiffness of micro-elements was developed and its usefulness has been demonstrated. The in-plane stiffness of a NIST nanopositioner has been measured directly using a colloidal probe in an AFM without any fixture. Using this method it was possible to measure the in-plane stiffness at different locations of the same micro-element. The in-plane stiffness ratio of a micro lever system was also measured and a good agreement was found between the calculated and measured values. Further, when the minimum width of flexures is 4 m, the measured in-plane stiffnesses showed a close agreement with the calculated value.|
|Citation:||Sensors and Actuators A: Physical|
|Pages:||pp. 383 - 387|
|Keywords:||AFM, colloidal probe, in-plane stiffness, MEMS, nanopositioner|
|Research Areas:||Manufacturing, Nanomanufacturing|
|PDF version:||Click here to retrieve PDF version of paper (701KB)|