@article{12491,
  author = {Seung and Yong and Premsagar Kavuri and Jae Yoo and Young Choi and Nicholas Dagalakis},
  title = {AFM characterization of nanopositioner in-plane stiffnesses},
  year = {2010},
  number = {163},
  month = {2010-08-19},
  publisher = {Sensors and Actuators A: Physical},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906223},
  language = {en},
}