TY  - JOUR
AU  - Seung
AU  - Yong
AU  - Premsagar Kavuri
AU  - Jae Yoo
AU  - Young Choi
AU  - Nicholas Dagalakis
C2  - Sensors and Actuators A: Physical
DA  - 2010-08-19
LA  - en
M1  - 163
PB  - Sensors and Actuators A: Physical
PY  - 2010
TI  - AFM characterization of nanopositioner in-plane stiffnesses
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906223
ER  -