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Publication Citation: Advanced Capacitance Metrology for Nanoelectronic Device Characterization

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Author(s): Curt A. Richter; Joseph J. Kopanski; Yicheng Wang; Muhammad Y. Afridi; Xiaoxiao Zhu; D. E. Ioannou; Qiliang Li; Chong Jiang;
Title: Advanced Capacitance Metrology for Nanoelectronic Device Characterization
Published: October 05, 2009
Abstract: We designed and fabricated a test chip (consisting of an array of metal-oxide-semiconductor (MOS) capacitors and metal-insulator-metal (MIM) capacitors ranging from 0.3 fF to 1.2 pF) for use in evaluating the performance of new measurement approaches for small capacitances. The complete array of capacitances was measured to obtain a fingerprint of capacitance values. After correcting these data for pad and other stray capacitances, such data can be used to evaluate the relative accuracy and sensitivity of a capacitance measurement instrument or circuit. This test chip was used to assess the capabilities of two different capacitance measurement approaches: an LCR meter, and a capacitance bridge. A silicon-nanowire based capacitance test structure was fabricated and characterized by using the optimized capacitance measurement methods developed with the MOS/MIM test chip.
Proceedings: AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009
Pages: pp. 328 - 332
Location: Albany, NY
Dates: May 11-15, 2009
Keywords: Nanoelectronics; test-structures; capacitance; nanowires; metal-insulator-semiconductor; metal-insulator-metal
Research Areas: Nanoelectronics and Nanoscale Electronics
PDF version: PDF Document Click here to retrieve PDF version of paper (522KB)