TY  - CONF
AU  - Curt Richter
AU  - Joseph Kopanski
AU  - Yicheng Wang
AU  - Muhammad Afridi
AU  - Xiaoxiao Zhu
AU  - D. Ioannou
AU  - Qiliang Li
AU  - Chong Jiang
C2  - AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009, Albany, NY
DA  - 2009-10-05
LA  - en
PB  - AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009, Albany, NY
PY  - 2009
TI  - Advanced Capacitance Metrology for Nanoelectronic Device Characterization
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903268
ER  -