@conference{60986,
  author = {Curt Richter and Joseph Kopanski and Yicheng Wang and Muhammad Afridi and Xiaoxiao Zhu and D. Ioannou and Qiliang Li and Chong Jiang},
  title = {Advanced Capacitance Metrology for Nanoelectronic Device Characterization},
  year = {2009},
  month = {2009-10-05},
  publisher = {AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009, Albany, NY},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903268},
  language = {en},
}