Publication Citation
NIST Authors in Bold
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| Author(s): | Ronald G. Dixson; J Schneir; T Mcwaid; Theodore V. Vorburger; |
|---|---|
| Title: | In Situ Tip Characterization for AFM and Application to Linewidth Metrology |
| Published: | January 01, 1994 |
| Abstract: | Abstract not available. |
| Proceedings: | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| Location: | Scottsdale, AZ |
| Dates: | January 1, 1995 |
| Research Areas: | Metrology, Manufacturing |