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Publication Citation: In Situ Tip Characterization for AFM and Application to Linewidth Metrology

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Author(s): Ronald G. Dixson; J Schneir; T Mcwaid; Theodore V. Vorburger;
Title: In Situ Tip Characterization for AFM and Application to Linewidth Metrology
Published: January 01, 1994
Abstract: Abstract not available.
Proceedings: International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
Location: Scottsdale, AZ
Dates: January 1, 1995
Research Areas: Metrology, Manufacturing