@conference{104501,
  author = {Ronald Dixson and J Schneir and T Mcwaid and Theodore Vorburger},
  title = {In Situ Tip Characterization for AFM and Application to Linewidth Metrology},
  year = {1994},
  month = {1994-01-01},
  publisher = {International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, Scottsdale, AZ},
  language = {en},
}