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Publication Citation: Mass Flow Research and Standards: NIST Workshop Results

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Author(s): Robert F. Berg; David S. Green; G E. Mattingly;
Title: Mass Flow Research and Standards: NIST Workshop Results
Published: July 01, 2001
Abstract: A recent workshop at the National Institute of Standards and Technology (NIST) identified research and standards that will benefit users and manufacturers of mass flow controllers and related equipment. The workshop identified problems with flow measurement in the semiconductor industry and proposed 21 tasks directed at those problems. Seven tasks were strongly recommended.
Citation: Future Fab International
Volume: 10
Pages: pp. 235 - 238
Keywords: flow measurement;mass flow controller;NIST
Research Areas: Pressure & Vacuum, Flow, Chemistry, Measurements