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|Author(s):||Robert F. Berg; David S. Green; G E. Mattingly;|
|Title:||Mass Flow Research and Standards: NIST Workshop Results|
|Published:||July 01, 2001|
|Abstract:||A recent workshop at the National Institute of Standards and Technology (NIST) identified research and standards that will benefit users and manufacturers of mass flow controllers and related equipment. The workshop identified problems with flow measurement in the semiconductor industry and proposed 21 tasks directed at those problems. Seven tasks were strongly recommended.|
|Citation:||Future Fab International|
|Pages:||pp. 235 - 238|
|Keywords:||flow measurement,mass flow controller,NIST|
|Research Areas:||Pressure & Vacuum, Flow, Chemistry, Measurements|
|PDF version:||Click here to retrieve PDF version of paper (237KB)|