TY - JOUR AU - Robert Berg AU - David Green AU - G Mattingly C2 - Future Fab International DA - 2001-07-01 LA - en M1 - 10 PB - Future Fab International PY - 2001 TI - Mass Flow Research and Standards: NIST Workshop Results UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830708 ER -