Micro-Feature Metrology

Published

May 1, 2005

Author(s)

Bala Muralikrishnan, Jack A. Stone Jr., John R. Stoup

Abstract

This presentation focuses on three aspects of micro-feature metrology novel applications that drive research and commercialization, capabilities and limitations of existing sensors and techniques, and finally a summary of recent research including ongoing work at NIST. Applications from a variety of industries have posed major metrology challenges. These include but are not limited to examples from automobile industry (fuel nozzles), medical (stents), consumer products (ink jet cartridges), MEMS (micro-gears), communications (fiber ferrules) etc. In response to these needs, a variety of new probing techniques have been developed and integrated into commercial Coordinate Measuring Machines (CMM). A new class of CMMs, referred to as hybrid CMMs have emerged. We will discuss some of the capabilities and limitations of such machines in the context of several applications such as fuel cell plate metrology, fiber ferrules, ring gages etc. Finally, we will also present an update on ongoing work at NIST on a novel fiber probe and a time-frame on calibrations services for micro features and small holes.

Proceedings Title

Proceedings of MicroManufacturing Conference and Exhibits 2006 - Society of Manufacturing Engineers

Conference Dates

March 22, 2006

Conference Location

Los Angeles, CA, USA

Conference Title

MicroManufacturing Conference and Exhibits 2006 - Society of Manufacturing Engineers

Pub Type

Conferences

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Keywords

dimensional metrology, micro feature metrology, micro manufacturing

Citation

Muralikrishnan, B. , Stone Jr., J. and Stoup, J. (2005), Micro-Feature Metrology, Proceedings of MicroManufacturing Conference and Exhibits 2006 - Society of Manufacturing Engineers, Los Angeles, CA, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823208 (Accessed April 23, 2024)