@conference{840231,
  author = {Bala Muralikrishnan and Jack Stone Jr. and John Stoup},
  title = {Micro-Feature Metrology},
  year = {2005},
  month = {2005-05-01 00:05:00},
  publisher = {Proceedings of MicroManufacturing Conference and Exhibits 2006 - Society of Manufacturing Engineers, Los Angeles, CA, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823208},
  language = {en},
}