Take a sneak peek at the new NIST.gov and let us know what you think!
(Please note: some content may not be complete on the beta site.).

View the beta site
NIST logo

Publication Citation: 2005 Variable Pressure/Environmental Scanning Electron Microscopy: Application to Photomask Dimensional Metrology

NIST Authors in Bold

Author(s): Michael T. Postek;
Title: 2005 Variable Pressure/Environmental Scanning Electron Microscopy: Application to Photomask Dimensional Metrology
Published: January 01, 2005
Abstract:
Proceedings: Nanotechnology and Nanomanufacturing Micro Nano Breakthrough Conference
Location: Portland, OR
Dates: July 25-28, 2005
Research Areas: Metrology, Manufacturing