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Publication Citation: 2005 Variable Pressure/Environmental Scanning Electron Microscopy: Application to Photomask Dimensional Metrology

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Author(s): Michael T. Postek;
Title: 2005 Variable Pressure/Environmental Scanning Electron Microscopy: Application to Photomask Dimensional Metrology
Published: January 01, 2005
Abstract:
Proceedings: Nanotechnology and Nanomanufacturing Micro Nano Breakthrough Conference
Location: Portland, OR
Dates: July 25-28, 2005
Research Areas: Metrology, Manufacturing