TY  - CONF
AU  - Michael Postek
C2  - Nanotechnology and Nanomanufacturing Micro Nano Breakthrough Conference, Portland, OR
DA  - 2005-01-01
LA  - en
PB  - Nanotechnology and Nanomanufacturing Micro Nano Breakthrough Conference, Portland, OR
PY  - 2005
TI  - 2005 Variable Pressure/Environmental Scanning Electron Microscopy: Application to Photomask Dimensional Metrology
ER  -